How to Make the Citation of this Document using the INPE Standard (BibINPE Format)
UEDA, M.; REUTHER, H.; GUNZEL, R.; BELOTO, A. F.; ABRAMOF, E.; BERNI, L. A. High dose nitrogen and carbon shallow implantation in Si by plasma immersion ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, v. 175-177, p. 715-720, Apr 2001. (INPE-13537-PRE/8750). Available from: <http://urlib.net/ibi/6qtX3pFwXQZ3r59YDa/KbR9p>.
How to Make the In-Text Citation (by author/year)
... as proposed by Ueda et al. (2001).
... may be found in the literature (UEDA et al., 2001).